A New Silicon-on-Insulator Lateral Insulated-Gate Bipolar Transistor with Dual-Channel Structure
To improve the latch-up and forward voltage drop properties of the silicon-on-insulator (SOI) lateral insulated-gate bipolar transistor (LIGBT), a new SOI LIGBT structure is proposed and fabricated. The new device employs a dual-channel structure in order to enable more electrons to flow into the n-...
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Published in | Japanese Journal of Applied Physics Vol. 40; no. 12R; p. 6683 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
01.12.2001
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Online Access | Get full text |
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Abstract | To improve the latch-up and forward voltage drop properties of the silicon-on-insulator (SOI) lateral insulated-gate bipolar transistor (LIGBT), a new SOI LIGBT structure is proposed and fabricated. The new device employs a dual-channel structure in order to enable more electrons to flow into the n-drift layer and to improve the latch-up characteristic. |
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AbstractList | To improve the latch-up and forward voltage drop properties of the silicon-on-insulator (SOI) lateral insulated-gate bipolar transistor (LIGBT), a new SOI LIGBT structure is proposed and fabricated. The new device employs a dual-channel structure in order to enable more electrons to flow into the n-drift layer and to improve the latch-up characteristic. |
Author | Young Sung, Woo-Beom Choi |
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Cites_doi | 10.1143/JJAP.36.1663 10.1143/JJAP.40.5262 10.1109/16.777171 10.3938/jkps.37.878 10.1143/JJAP.37.1305 10.1143/JJAP.40.5267 10.1143/JJAP.36.5516 |
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