Computerized Control and Operation of Rutherford Backscattering/Channeling for an in situ Ion Beam System and Its Application for Measurement of Si(001) and ZnO(001)
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Published in | Chinese physics letters Vol. 28; no. 1; p. 012901 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.01.2011
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Online Access | Get full text |
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ISSN: | 0256-307X 1741-3540 |
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DOI: | 10.1088/0256-307X/28/1/012901 |