A Monolithic CMOS Microwave Heater

A monolithic microwave heater is fabricated using 0.18-μm CMOS technology. The monolithic microwave heater consists of an oscillator, an amplifier, and temperature sensors. The load inductor of the amplifier is used as the heat applicator and surrounded by the temperature sensors for temperature det...

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Bibliographic Details
Published inIEEE transactions on microwave theory and techniques Vol. 67; no. 12; pp. 4783 - 4790
Main Authors Chen, Hsiao-Chin, Xiao, Hong-Qi, Tseng, Tzu-Yu
Format Journal Article
LanguageEnglish
Published New York IEEE 01.12.2019
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Amplifiers
CMOS
Electromagnetic heating
Heat applicator
Inductors
microwave heating
Microwave oscillators
Microwave theory and techniques
monolithic heater
Power consumption
Sensors
temperature sensor
Temperature sensors
tissue-mimicking phantoms
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Summary:A monolithic microwave heater is fabricated using 0.18-μm CMOS technology. The monolithic microwave heater consists of an oscillator, an amplifier, and temperature sensors. The load inductor of the amplifier is used as the heat applicator and surrounded by the temperature sensors for temperature detection. Consuming the power of 113.6 mW, the amplifier delivers an output power ~13.3 dBm (~21.2 mW) at 2.36 GHz. The on-chip temperature sensor provides the detection range from 20 °C to 40 °C with the temperature coefficient around 50 mV/°C. When 80 mg of agar phantom is placed above the microwave heater, its temperature is raised by 4.9 °C in 60 min.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2019.2933617