Continuous Emission Spectrum Measurement for Electron Temperature Determination in Low-Temperature Collisional Plasmas

Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is...

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Published inPlasma science & technology Vol. 13; no. 4; pp. 451 - 457
Main Author 刘秋艳 李弘 陈志鹏 谢锦林 刘万东
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.08.2011
Subjects
Abel变换
低温等离子体
光谱测量
温度测定
烟气排放
电子温度
电感耦合等离子体发射光谱
碰撞等离子体
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Summary:Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron tem- perature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.
Bibliography:continuous emission spectrum, diagnostics, low-temperature plasma, colli- sional plasma
Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron tem- perature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.
LIU qiuyan , LI Hong , CHEN Zhipeng , XIE Jinlin , LIV Wandong（CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China）
34-1187/TL
ISSN:1009-0630
DOI:10.1088/1009-0630/13/4/13