Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools
In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exi...
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| Published in | IEEE transactions on systems, man, and cybernetics. Systems Vol. 48; no. 3; pp. 389 - 400 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
New York
IEEE
01.03.2018
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subjects | |
| Online Access | Get full text |
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| Abstract | In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exit from a processing chamber before its quality degradation within a certain time limit. To obtain higher yield, it is very important to optimize a close-down process for a cluster tool. Yet the existing literature pays no or little attention to this issue. By focusing on a time-constrained single-arm cluster tool, this paper intends: 1) to build its Petri net model to analyze its schedulability and 2) to develop computationally efficient algorithms to find an optimal and feasible schedule for its closing-down process under different workloads at its steps. Industrial examples are used to illustrate the application of the proposed method. |
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| AbstractList | In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exit from a processing chamber before its quality degradation within a certain time limit. To obtain higher yield, it is very important to optimize a close-down process for a cluster tool. Yet the existing literature pays no or little attention to this issue. By focusing on a time-constrained single-arm cluster tool, this paper intends: 1) to build its Petri net model to analyze its schedulability and 2) to develop computationally efficient algorithms to find an optimal and feasible schedule for its closing-down process under different workloads at its steps. Industrial examples are used to illustrate the application of the proposed method. |
| Author | Qiao, Yan Zhu, QingHua Zhou, MengChu Wu, NaiQi |
| Author_xml | – sequence: 1 givenname: QingHua surname: Zhu fullname: Zhu, QingHua email: zhuqh@gdut.edu.cn organization: School of Computer Science and Technology, Guangdong University of Technology, Guangzhou, China – sequence: 2 givenname: MengChu orcidid: 0000-0002-5408-8752 surname: Zhou fullname: Zhou, MengChu email: zhou@njit.edu organization: Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, USA – sequence: 3 givenname: Yan surname: Qiao fullname: Qiao, Yan email: yqiao@must.edu.mo organization: Institute of Systems Engineering, Macau University of Science and Technology, Macau, China – sequence: 4 givenname: NaiQi surname: Wu fullname: Wu, NaiQi email: nqwu@must.edu.mo organization: Institute of Systems Engineering, Macau University of Science and Technology, Macau, China |
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| SubjectTerms | Batch processing Cluster tool Clusters discrete event systems Optimal scheduling Optimization Petri net (PN) Preventive maintenance robotic systems Robots Schedules scheduling Semiconductor device modeling Steady-state Time factors Transient analysis wafer fabrication |
| Title | Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools |
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