Research of Low-Power MEMS-Based Micro Hotplates Gas Sensor: A Review

• Published in: IEEE sensors journal Vol. 21; no. 17; pp. 18368 - 18380
• Main Authors: Yuan, Zhenyu, Yang, Fan, Meng, Fanli, Zuo, Kaiyuan, Li, Jin
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.09.2021; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Conduction heating; Conductive heat transfer; Convection; Finite element method; Gas detectors; Gas sensors; Heat loss; Heating systems; Insulation; Low power consumption; micro hot plate; Power consumption; Remote sensors; Sensor phenomena and characterization; Sensors; Structural beams; Substrates; thermal characteristics; Thermal radiation; Thermal sensors
• ISSN: 1530-437X; 1558-1748
• DOI: 10.1109/JSEN.2021.3088440

In this paper, the research status of low power micro hot plate gas sensor is reviewed. This type of sensor is characterized by the combination of MEMS technology and related insulation measures. Compared with the traditional ceramic tubular sensor, the power consumption of the sensor is greatly reduced, which provides the possibility of remote sensor arrangement and long term stable operation. This paper firstly collects the current sensor-related heat conduction, heat convection and heat radiation theories, and summarizes the calculation model of heat loss in different regions of the micro hot plate gas sensor. Then, the application examples of the finite element method in the analysis of thermal characteristics of the sensor and the common preparation process of the substrate and gas sensitive layer of the micro hot plate are listed. Finally, the main test methods of the stability and gas sensitivity of the micro hot plate gas sensor are summarized.