Low Power Electromagnetic Scanning Micromirror for LiDAR System
In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed...
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Published in | IEEE sensors journal Vol. 21; no. 6; pp. 7358 - 7366 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
15.03.2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nm rms . An optical scan angle of 30° is obtained at 690 Hz, 17.4 mA rms input, and corresponding power consumption is 7.8 mW rms . A prototype scanning system with <inline-formula> <tex-math notation="LaTeX">180^{\circ } \times 30^{\circ } </tex-math></inline-formula> field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications. |
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ISSN: | 1530-437X 1558-1748 |
DOI: | 10.1109/JSEN.2020.3048710 |