A High-Density Metal-Fuse Technology Featuring a 1.6 V Programmable Low-Voltage Bit Cell With Integrated 1 V Charge Pumps in 22 nm Tri-Gate CMOS

The first metal-fuse technology in 22 nm tri-gate high-k metal-gate CMOS technology is presented. The memory technology offerings in high-volume manufacturing include a 2.05 μm 2 2.2 V programmable high-density and a 16.4 μm 2 1.6 V programmable low-voltage (LV) 1T1R bit cell. The LV operability of...

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Bibliographic Details
Published inIEEE journal of solid-state circuits Vol. 51; no. 4; pp. 1003 - 1008
Main Authors Kulkarni, Sarvesh H., Chen, Zhanping, Srinivasan, Balaji, Pedersen, Brian, Bhattacharya, Uddalak, Zhang, Kevin
Format Journal Article
LanguageEnglish
Published New York IEEE 01.04.2016
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
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Summary:The first metal-fuse technology in 22 nm tri-gate high-k metal-gate CMOS technology is presented. The memory technology offerings in high-volume manufacturing include a 2.05 μm 2 2.2 V programmable high-density and a 16.4 μm 2 1.6 V programmable low-voltage (LV) 1T1R bit cell. The LV operability of the technology allows the fuse arrays to be coupled with power delivery circuits operating at standard logic voltage levels. A charge pump voltage doubler operating on a 1 V voltage rail is demonstrated in this paper with healthy fusing yield.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2015.2507786