Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-rectangular resonator under the input of the microwave power at 2.45 GHz. The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar I...

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Published inChinese physics letters Vol. 31; no. 5; pp. 97 - 99
Main Author 王仲 张贵新 刘程 贾志东
Format Journal Article
LanguageEnglish
Published 01.05.2014
Subjects
Argon
Atmospherics
Electron density
Excitation
Inductive coupling
Microwave plasmas
Microwaves
Plasma (physics)
大气压
微波功率
微波等离子体源
氩气
激发温度
电子密度
电子温度
耦合窗口
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Summary:An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-rectangular resonator under the input of the microwave power at 2.45 GHz. The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar I lines in two different wavelength ranges while the electron temperature is researched by using line-to-continuum intensity ratio of Ar I lines. The electron density is compared by using the Stark broadenings of At I lines at 522.13nm and 549.59nm and Ha line at 486.13nm.
Bibliography:An infinite-volume of atmospheric argon microwave plasma is produced in the microwave plasma source based on the inductive coupling window-rectangular resonator under the input of the microwave power at 2.45 GHz. The excitation temperature of the plasma is studied by using the Boltzmann plot of Ar I lines in two different wavelength ranges while the electron temperature is researched by using line-to-continuum intensity ratio of Ar I lines. The electron density is compared by using the Stark broadenings of At I lines at 522.13nm and 549.59nm and Ha line at 486.13nm.
11-1959/O4
WANG Zhong, ZHANG Gui-Xin, LIU Cheng, JIA Zhi-Dong（Department of Electrical Engineering, Tsinghua University, Beijing 100084）
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/31/5/055203