Thickness Measurement of Polystyrene Coating on QCM Sensor using Interferometvanry Principles

Abstract Coating film thickness is one of many important aspects in the development of Quartz Crystal Microbalance (QCM) for chemical sensors and biosensors. The coating layer is utilized as a matrix layer for the bio-sensitive molecule or as a sensitive layer. Also, the coating thickness is an impo...

Full description

Saved in:
Bibliographic Details
Published inJournal of physics. Conference series Vol. 1951; no. 1; pp. 12043 - 12047
Main Authors Anggraeni, D, Sakti, S P
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.06.2021
Subjects
Biosensors
Chemical sensors
Coating
Coherent light
Film thickness
Interferometry
Laser beams
Mathematical analysis
Measurement methods
Microbalances
Micrometers
Nondestructive testing
Parameter sensitivity
Physical properties
Polystyrene resins
Quartz crystals
Sensors
Thickness measurement
Thin films
Online AccessGet full text

Cover

More Information
Summary:Abstract Coating film thickness is one of many important aspects in the development of Quartz Crystal Microbalance (QCM) for chemical sensors and biosensors. The coating layer is utilized as a matrix layer for the bio-sensitive molecule or as a sensitive layer. Also, the coating thickness is an important physical parameter, which determines the sensitivity and stability of the QCM sensor. Commonly for the thin film or glassy film, the Sauerbrey equation was used to calculate the film thickness. However, the method is inaccurate for a rubbery film. In this study, a non-destructive method was developed to measure the thickness of a transparent layer deposited on QCM using the interferometry method. This interferometry method uses the principle of coherent light interference between the initial laser beam and the one that has passed through a transparent layer. In this work polystyrene film which is known as a glassy film was used. The results of this study show that the interferometry method can be used to measure the thickness of the polystyrene layer deposited on the QCM sensor, as a non-destructive measurement method. These results are validated by calculations from the Sauerbrey equation, in calculating the thickness of polystyrene-based on changes in the frequency of the QCM sensor, which is 0.421 micrometers.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1951/1/012043