Review of the mathematical foundations of data fusion techniques in surface metrology

The recent proliferation of engineered surfaces, including freeform and structured surfaces, is challenging current metrology techniques. Measurement using multiple sensors has been proposed to achieve enhanced benefits, mainly in terms of spatial frequency bandwidth, which a single sensor cannot pr...

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Bibliographic Details
Published inSurface topography metrology and properties Vol. 3; no. 2; pp. 23001 - 23018
Main Authors Wang, Jian, Leach, Richard K, Jiang, X
Format Journal Article
LanguageEnglish
Published IOP Publishing 02.04.2015
Subjects
data fusion
multisensor
surface metrology
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Summary:The recent proliferation of engineered surfaces, including freeform and structured surfaces, is challenging current metrology techniques. Measurement using multiple sensors has been proposed to achieve enhanced benefits, mainly in terms of spatial frequency bandwidth, which a single sensor cannot provide. When using data from different sensors, a process of data fusion is required and there is much active research in this area. In this paper, current data fusion methods and applications are reviewed, with a focus on the mathematical foundations of the subject. Common research questions in the fusion of surface metrology data are raised and potential fusion algorithms are discussed.
ISSN:2051-672X
2051-672X
DOI:10.1088/2051-672X/3/2/023001