In-situ characterization of thin polymer films for applications in chemical sensing of volatile organic compounds by spectroscopic ellipsometry

• Published in: Analytical and bioanalytical chemistry Vol. 357; no. 3; pp. 292 - 296
• Main Authors: Spaeth, Karin, Kraus, Gerolf, Gauglitz, Günter
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Berlin Springer 01.02.1997; Springer Nature B.V
• Subjects: Analytical chemistry; Chemical perception; Chemical sensors; Chemistry; Chemoreception; Coatings; Cyclohexane; Exact sciences and technology; General, instrumentation; Optical measuring instruments; Optical properties; Organic compounds; Physical properties; Polydimethylsiloxane; Polymer coatings; Polymer films; Polymers; Refractivity; Sensors; Spectroellipsometry; Spectroscopy; Tetrachloroethylene; Thin films; Toluene; VOCs; Volatile organic compounds; Chemical sensors; Refractive index; Toluene; Coatings; Ellipsometry; Ethylene(tetrachloro); Characterization; Volatile organic compounds; Thin films; Thickness; Cyclohexane; Polymers; Silicones

Polymer coatings are applied in many kinds of chemical sensors. The interaction with organic vapours changes the physical properties of the coating material. For optical sensors, changes in the coating volume and the complex refractive index are most important. Spectroscopic ellipsometry has been ap...