Low-Loss Waveguide Fabrication by Inkjet Printing on Porous Silicon

We report fabrication of optical waveguides embedded in oxidized porous silicon in a maskless process. Patterned pore-filling was attained by means of inkjet printing, enabling lateral modification of the waveguide's index of refraction, and other optical properties, thus providing full two-dim...

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Bibliographic Details
Published inJournal of lightwave technology Vol. 37; no. 14; pp. 3439 - 3443
Main Authors Kellarev, Alexander, Ruschin, Shlomo
Format Journal Article
LanguageEnglish
Published New York IEEE 15.07.2019
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Filling
Ink jet printers
Inkjet printing
Optical device fabrication
Optical films
Optical properties
Optical refraction
Optical variables control
Optical waveguides
Porous silicon
printing
Refractive index
Refractivity
Saline solutions
Silicon
Wave propagation
waveguides
Wavelengths
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Summary:We report fabrication of optical waveguides embedded in oxidized porous silicon in a maskless process. Patterned pore-filling was attained by means of inkjet printing, enabling lateral modification of the waveguide's index of refraction, and other optical properties, thus providing full two-dimensional refractive index control of the optical waveguide. The waveguides were created by applying a KDP salt solution over a porous silicon film by means of a material printer. Light guiding was demonstrated at wavelengths 1.064 and 1.550 μm. Measured values of the propagation loss at these wavelengths were 2.4 dB/cm and below 0.5 dB/cm, respectively.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2019.2914503