Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering

Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic si...

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Bibliographic Details
Published inJournal of microelectromechanical systems Vol. 32; no. 6; pp. 522 - 528
Main Authors Maspero, Federico, De Ponti, Jacopo Maria, Iorio, Luca, Esposito, Annachiara, Bertacco, Riccardo, Matteo, Andrea di, Corigliano, Alberto, Ardito, Raffaele
Format Journal Article
LanguageEnglish
Published New York IEEE 01.12.2023
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
delay lines
Elastic filters
Elastic waves
Energy harvesting
Filtering
Filtration
graded resonators
Metamaterials
Micromechanical devices
Probes
rainbow effect
Resonant frequency
Resonators
Signal to noise ratio
Silicon
Silicon substrates
Wave amplification
Waveguides
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Summary:Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting. [2023-0117]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2023.3320198