Precision of Silicon Oxynitride Refractive-Index Profile Retrieval Using Optical Characterization

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Bibliographic Details
Published inActa physica Polonica, A Vol. 140; no. 3; pp. 215 - 221
Main Authors Kanclíř, V., Václavík, J., Žídek, K.
Format Journal Article
LanguageEnglish
Published 01.09.2021
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ISSN:1898-794X
0587-4246
DOI:10.12693/APhysPolA.140.215