The influence of the LOCOS processing parameters on the shape of the bird's beak structure

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 130; no. 7; pp. 1563 - 1566
Main Authors WU, T.-C, STACY, W. T, RITZ, K. N
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.01.1983
Subjects
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Scanning electron microscopy
Microelectronic fabrication
Models
Silicon
Transmission electron microscopy
Insulation technology
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2120035