Vertically Curved Si Waveguide Coupler with Low Loss and Flat Wavelength Window

Silicon photonics enabling ultra-small photonic integrated circuits induces a necessity to develop efficient optical couplers that connect silicon waveguides with optical fibers or offchip other optical components. Vertical couplers are promising for both wafer-level testing and the integration of o...

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Bibliographic Details
Published inJournal of lightwave technology Vol. 34; no. 7; pp. 1567 - 1571
Main Authors Yoshida, Tomoya, Omoda, Emiko, Atsumi, Yuki, Nishi, Takashi, Tajima, Syougo, Miura, Noboru, Mori, Masahiko, Sakakibara, Youichi
Format Journal Article
LanguageEnglish
Published New York IEEE 01.04.2016
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Annealing
Couplers
Ion implantation
Optical fibers
Optical interconnections
Optical losses
Silicon
Silicon photonics
silicon photonics
optical interconnections
Ion implantation
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Summary:Silicon photonics enabling ultra-small photonic integrated circuits induces a necessity to develop efficient optical couplers that connect silicon waveguides with optical fibers or offchip other optical components. Vertical couplers are promising for both wafer-level testing and the integration of optical components on the chip surface, but so far grating couplers have been the only solution virtually. Very recently, we have developed a few-micron-scale vertically-curved silicon waveguide coupler "elephant coupler" formed by ion implantation method. This paper demonstrates that the coupler has high coupling efficiency, weak wavelength dependence, and weak incident angle dependence of wavelength window, which are not obtained by the grating couplers. The paper also demonstrates that the thermal annealing treatment can reduce optical propagation loss induced by the ion implantation.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2015.2506732