Surface-relief phase structures generated by light-initiated polymerization
A method for fabricating refractive micro-optical elements by structuring poly(methyl methacrylate) layers is presented. With this flexible and simple method a surface growth of several micrometers can be achieved. For smooth surface reliefs a nearly linear response of the phase growth to the UV int...
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| Published in | Applied optics (2004) Vol. 34; no. 22; p. 4747 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
United States
01.08.1995
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| Online Access | Get more information |
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| Summary: | A method for fabricating refractive micro-optical elements by structuring poly(methyl methacrylate) layers is presented. With this flexible and simple method a surface growth of several micrometers can be achieved. For smooth surface reliefs a nearly linear response of the phase growth to the UV intensity can be achieved over a range of 8π. The edge steepness depends on the maximum height and can reach values as high as 2π above 4 µm. We describe the fabrication process, establish a mathematical model of the surface growth, and also present as experimental results some components fabricated by this method. |
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| ISSN: | 1559-128X |
| DOI: | 10.1364/AO.34.004747 |