Fabrication and properties of Al2O3 and AlN coatings for fusion reactor blanket by sputtering method

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Bibliographic Details
Published inSurface & coatings technology Vol. 106; no. 1; pp. 18 - 22
Main Authors Terai, Takayuki, Kobayashi, Tomohiro, Mitsuyama, Takaaki, Yoneoka, Toshiaki, Tanaka, Satoru
Format Journal Article
LanguageEnglish
Japanese
Published Lausanne Elsevier BV 01.07.1998
Elsevier
Subjects
Cross-disciplinary physics: materials science; rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Thermonuclear reactors
Aluminium nitrides
Physical vapor deposition
Thermodynamic stability
Surface treatments
XRD
Experimental study
Coatings
Sputtering
Aluminium oxides
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ISSN:0257-8972
DOI:10.1016/s0257-8972(98)00486-1