Threading dislocations in GaAs epitaxial layers on various thickness Ge buffers on 300 mm Si substrates
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Published in | Journal of crystal growth Vol. 453; pp. 180 - 187 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier
01.11.2016
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Subjects | |
Online Access | Get full text |
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ISSN: | 0022-0248 |
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DOI: | 10.1016/j.jcrysgro.2016.08.022 |