Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable

• Published in: Tsinghua science and technology Vol. 11; no. 5; pp. 533 - 537
• Main Authors: Alexander, Gaisser, Gao, Zhongyu, Zhou, Bin, Zhang, Rong, Chen, Zhiyong
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.10.2006; Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
• Subjects: calibration; digital readout; gyroscope; micro-machined angular rate sensor; scale factor; digital readout; calibration; scale factor; micro-machined angular rate sensor; gyroscope
• ISSN: 1007-0214; 1878-7606; 1007-0214
• DOI: 10.1016/S1007-0214(06)70230-9

This paper presents a digital readout system to detect small capacitive signals of a micro-machined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations. The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.