Image resolution in reflection scanning near-field optical microscopy using shear-force feedback: characterization with a spline and Fourier spectrum
Scanning near-field optical microscopes (SNOM's) actually lead to nanometric lateral resolution. A combination with shear-force feedback is sometimes used to keep the SNOM tip at a constant force from the sample. However, resolutions in shear-force and optical data are different. An estimation...
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Published in | Applied optics (2004) Vol. 36; no. 10; p. 2171 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
United States
01.04.1997
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Online Access | Get more information |
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Summary: | Scanning near-field optical microscopes (SNOM's) actually lead to nanometric lateral resolution. A combination with shear-force feedback is sometimes used to keep the SNOM tip at a constant force from the sample. However, resolutions in shear-force and optical data are different. An estimation of both resolutions is important for characterizing the capabilities of such systems. The basic principle of the measurement is to compare a spline-fitted logarithm of the power spectra calculated with the optical image with that of the shear force image in which resolution is determined a priori. Quantitative results are given in the case of periodic or untested sample and simulated data. Moreover the accuracy and the stability of the method are discussed. |
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ISSN: | 1559-128X 2155-3165 |
DOI: | 10.1364/AO.36.002171 |