Automated diagnostics of a magnetron discharge plasma based on atomic molecular emission spectra

A software-hardware complex intended for investigating spatial distributions of the plasma spectral emissivity is described. It allows us to record and identify the lines and systems of molecular bands in an automatic mode and to perform computer processing of spectra. Molecular bands of deuterium f...

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Bibliographic Details
Published inPlasma physics reports Vol. 38; no. 13; pp. 1099 - 1104
Main Authors Gradov, V. M., Zimin, A. M., Krivitskiy, S. E., Serushkin, S. V., Troynov, V. I.
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.12.2012
Subjects
Atomic
Molecular
Optical and Plasma Physics
Physics
Physics and Astronomy
Plasma Diagnostics
Rotational Temperature
Plasma Physic Report
Molecular Spectrum
Atomic Line
Vibrational Temperature
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Summary:A software-hardware complex intended for investigating spatial distributions of the plasma spectral emissivity is described. It allows us to record and identify the lines and systems of molecular bands in an automatic mode and to perform computer processing of spectra. Molecular bands of deuterium for different electronic-vibrational-rotational transitions are identified. The excitation temperatures of atomic levels, translational, rotational and vibrational temperatures are estimated for a discharge in a planar magnetron.
ISSN:1063-780X
1562-6938
DOI:10.1134/S1063780X12110025