Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode

The characterization of the first in-plane mode of aluminum nitride-actuated piezoelectric microcantilevers was carried out by using electrical and optical techniques. The top electrode of the cantilever was specifically designed to allow for an efficient electrical actuation of these in-plane modes...

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Bibliographic Details
Published inMicrosystem technologies : sensors, actuators, systems integration Vol. 18; no. 7-8; pp. 997 - 1001
Main Authors Ruiz, V., Hernando-García, J., Ababneh, A., Seidel, H., Schmid, U., Sánchez-Rojas, J. L.
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer-Verlag 01.08.2012
Subjects
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
Finite Element Model Model
Laser Doppler Vibrometer
Scanning Laser Doppler Vibrometer
Cantilever Surface
Electrical Actuation
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Summary:The characterization of the first in-plane mode of aluminum nitride-actuated piezoelectric microcantilevers was carried out by using electrical and optical techniques. The top electrode of the cantilever was specifically designed to allow for an efficient electrical actuation of these in-plane modes. In order to confirm the in-plane nature of the modal vibration, the detection of the electrically induced movement was performed optically with the help of a stroboscopic microscope. In parallel, resonances were also measured electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the corresponding measurement data when applying both detection techniques. Our results show quality factor values as high as 3,000 for the first in-plane mode in air.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-012-1428-x