Properties of nanosized carbon coatings doped with nitrogen, tungsten, and aluminium and obtained by pulse vacuum arc method

Results of investigations into the properties of nanosized carbon coatings doped with nitrogen, tungsten, and aluminium and obtained on silicon by the pulse vacuum arc method are discussed. The doping effect on internal stress values, microhardness, and surface morphology was studied. It has been es...

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Published inNanotechnologies in Russia Vol. 5; no. 3-4; pp. 160 - 164
Main Authors Kolpakov, A. Ya, Poplavsky, A. I., Galkina, M. E., Sudzhanskaya, I. V., Goncharov, I. Yu, Druchinina, O. A., Strigunov, N. V., Kharchenko, V. A., Merchansky, O. Yu
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.04.2010
Subjects
Chemistry and Materials Science
Industrial and Production Engineering
Machines
Manufacturing
Materials Science
Nanotechnology
Processes
Internal Stress
Carbon Coat
Scanning Probe Microscopy
Carbon Coating
Carbon Nitride
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Summary:Results of investigations into the properties of nanosized carbon coatings doped with nitrogen, tungsten, and aluminium and obtained on silicon by the pulse vacuum arc method are discussed. The doping effect on internal stress values, microhardness, and surface morphology was studied. It has been established that doping nanosized carbon coatings with nitrogen, tungsten, and aluminium makes it possible affect their internal stress values, surface morphology, and the strength properties of the substrate-coating system.
ISSN:1995-0780
1995-0799
DOI:10.1134/S199507801003002X