Interaction between plasma and the channel surface in a multichannel hollow cathode

A physical-mathematical model of the erosion of a multichannel hollow cathode operating in the arc-discharge mode with inert gas flow is developed. The processes of evaporation, sputtering, and recycling of the cathode material are considered. The dependence of the erosion rate on the discharge para...

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Published inSurface investigation, x-ray, synchrotron and neutron techniques Vol. 8; no. 3; pp. 581 - 587
Main Authors Obukhov, V. A., Cherkasova, M. V.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.05.2014
Subjects
Chemistry and Materials Science
Materials Science
Surfaces and Interfaces
Thin Films
Neutron Technique
Cathode Surface
Erosion Rate
Cathode Material
Surface Investigation
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Summary:A physical-mathematical model of the erosion of a multichannel hollow cathode operating in the arc-discharge mode with inert gas flow is developed. The processes of evaporation, sputtering, and recycling of the cathode material are considered. The dependence of the erosion rate on the discharge parameters is studied. Estimates for integrated and local erosion of the cathode are obtained. The calculation results satisfactorily agree with the experiment.
ISSN:1027-4510
1819-7094
DOI:10.1134/S1027451014030331