An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure

A method for taking into account the complex structure of single-layer thin-film coatings, which is formed due to the effect of interfaces between the film and surrounding media, for solving the inverse problem of ellipsometry by a modified Malin—Vedam method is proposed and the features of its appl...

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Bibliographic Details
Published inOptics and spectroscopy Vol. 119; no. 2; pp. 268 - 272
Main Authors Tikhii, A. A., Gritskikh, V. A., Kara-Murza, S. V., Korchikova, N. V., Nikolaenko, Yu. M., Faraponov, V. V., Zhikharev, I. V.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.08.2015
Subjects
Lasers
Optical Devices
Optics
Photonics
Physical Optics
Physics
Physics and Astronomy
Ellipsometric Angle
Film Boundary
Ellipsometric Measurement
Optical Parameter
Intermediate Layer
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Summary:A method for taking into account the complex structure of single-layer thin-film coatings, which is formed due to the effect of interfaces between the film and surrounding media, for solving the inverse problem of ellipsometry by a modified Malin—Vedam method is proposed and the features of its application are described. As an example, this method is used to interpret the results of ellipsometric measurements of a close-to-stoichiometric polycrystalline La 0.7 Sr 0.3 MnO 3 film on a crystalline Al 2 O 3 (LSMO/AO) substrate.
ISSN:0030-400X
1562-6911
DOI:10.1134/S0030400X15080238