Sub-micrometer-thick and low-loss Ge20Sb15Se65 rib waveguides for nonlinear optical devices

We report the fabrication and optical properties of sub-micrometer-thick Ge 20 Sb 15 Se 65 chalcogenide rib waveguides. The radio-frequency (RF) magnetron sputtering method is used to deposit 0.83 μm-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer,...

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Bibliographic Details
Published inOptoelectronics letters Vol. 11; no. 3; pp. 203 - 206
Main Authors Li, Jun, Chen, Fen, Shen, Xiang, Dai, Shi-xun, Xu, Tie-feng, Nie, Qiu-hua
Format Journal Article
LanguageEnglish
Published Tianjin Tianjin University of Technology 01.05.2015
Subjects
Lasers
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Transverse Magnetic
Transverse Electric
Bulk Glass
Transverse Magnetic Mode
Atomic Layer Deposition
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Summary:We report the fabrication and optical properties of sub-micrometer-thick Ge 20 Sb 15 Se 65 chalcogenide rib waveguides. The radio-frequency (RF) magnetron sputtering method is used to deposit 0.83 μm-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, and CHF 3 is used as the etching plasma for reactive ion etching (RIE). Finally, the resulted rib waveguides with smooth sidewalls and vertical pattern profiles are rendered. The propagation losses for 4 μm-wide waveguides are measured to be 0.7 dB/cm for transverse electric (TE) modes and 0.68 dB/cm for transverse magnetic (TM) modes at 1 550 nm via the cutback method.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-015-4231-y