Precision processing of CVD diamond plates by Cu-laser irradiation
The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose ir...
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| Published in | Instruments and experimental techniques (New York) Vol. 53; no. 2; pp. 301 - 304 |
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| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Dordrecht
SP MAIK Nauka/Interperiodica
01.03.2010
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose irradiation can be focused to a small spot and also used for the intensification of the image brightness in an optical system, which is able to process ∼10
6
points of an object for one (∼10 ns) or a few pulses. The characteristics of processed surfaces of polycrystalline diamond films and plates are given. |
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| AbstractList | The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose irradiation can be focused to a small spot and also used for the intensification of the image brightness in an optical system, which is able to process ∼10
6
points of an object for one (∼10 ns) or a few pulses. The characteristics of processed surfaces of polycrystalline diamond films and plates are given. |
| Author | Vlasov, A. V. Zemskov, K. I. Ral’chenko, V. G. Buzhinskii, R. O. Isaev, A. A. Savranskii, V. V. |
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| Keywords | Polycrystalline Diamond Processing Depth Laser Irradiation Diamond Film Focus Laser Beam |
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| References | HardyW.A.IBM J. Res. & Develop.19659113711544448 BuzhinskiiO.I.Evolyutsiya issledovanii Cu-lazera i vozmozhnosti ego prakticheskogo primeneniya: Obzor1983MoscowIAE im I.V. Kurchatova(Evolution in the Investigation of a Cu Laser and the Possibility of Its Practical Application: Review) PetrashG.G.Vestn. Akad. Nauk SSSR1982266 Ral’chenko, V. and Konov, V., Elektron.: Nauka, Tekhnol., Biznes, 2007, no. 4, p. 58. PimenovS.M.KononenkoV.V.Ral’chenkoV.G.Appl. Phys. A: Materials Sci. Proc.19996918110.1007/s0033900509751999ApPhA..69...81P ZemskovK.I.IsaevA.A.KazaryanM.A.PetrashG.G.Kvantovaya Electron.19763135[Quantum Electronics (Engl. Transl.), 1976, vol. 6, no. 1, p. 17] O.I. Buzhinskii (6173_CR6) 1983 S.M. Pimenov (6173_CR2) 1999; 69 K.I. Zemskov (6173_CR4) 1976; 3 6173_CR1 G.G. Petrash (6173_CR5) 1982; 2 W.A. Hardy (6173_CR3) 1965; 9 |
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| SubjectTerms | Electrical Engineering Laboratory Techniques Measurement Science and Instrumentation Physical Chemistry Physics Physics and Astronomy |
| Title | Precision processing of CVD diamond plates by Cu-laser irradiation |
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