Precision processing of CVD diamond plates by Cu-laser irradiation

The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose ir...

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Published inInstruments and experimental techniques (New York) Vol. 53; no. 2; pp. 301 - 304
Main Authors Buzhinskii, R. O., Zemskov, K. I., Isaev, A. A., Vlasov, A. V., Ral’chenko, V. G., Savranskii, V. V.
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.03.2010
Subjects
Electrical Engineering
Laboratory Techniques
Measurement Science and Instrumentation
Physical Chemistry
Physics
Physics and Astronomy
Polycrystalline Diamond
Processing Depth
Laser Irradiation
Diamond Film
Focus Laser Beam
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Summary:The chemical vapor deposition (CVD) technique is applied for synthesizing diamond films and plates of large size (∼100 mm) and high quality. In the given work, we consider one of the diamond-structure dimensional processing and microprocessing methods based on the application of a Cu laser, whose irradiation can be focused to a small spot and also used for the intensification of the image brightness in an optical system, which is able to process ∼10 6 points of an object for one (∼10 ns) or a few pulses. The characteristics of processed surfaces of polycrystalline diamond films and plates are given.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441210020272