Preparation of micro-patterned surfaces of Si-N-O films and their influence on adhesion behavior of endothelial cells

Microgrooves were prepared on Si (100) surface by photolithography and wet etching. Subsequently, Si-N-O films were deposited on the microgrooves by unbalanced magnetron sputtering (UBMS) and micro-patterned surfaces of Si-N-O films were obtained. The size of the micropatterns was measured by surfac...

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Bibliographic Details
Published inScience China. Technological sciences Vol. 53; no. 1; pp. 257 - 263
Main Authors Zheng, Nan, Yang, Ping, Wang, QiYi, Yang, ZhongHai, Huang, Nan
Format Journal Article
LanguageEnglish
Published Heidelberg SP Science in China Press 2010
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Summary:Microgrooves were prepared on Si (100) surface by photolithography and wet etching. Subsequently, Si-N-O films were deposited on the microgrooves by unbalanced magnetron sputtering (UBMS) and micro-patterned surfaces of Si-N-O films were obtained. The size of the micropatterns was measured by surface profilometer. The chemical composition of Si-N-O films were characterized by X-ray photoelectron spectrometry (XPS) and the wettability of the micropatterned surfaces was evaluated by contact angle measurement. The behavior of endothelial cells adhered on the micro-patterned surfaces, including cells adhesion, proliferation and orientation, was evaluated by cell culture test and Alamar blue assay. The results showed that the amount and activity of endothelial cells on micro-patterned samples were higher than those on flat samples. After one day’s incubation, the cells were well guided along the microgrooves. Three days later, most of the cells grew across the grooves and contacted each other. Their activity was also much higher than that on flat samples. It was suggested that the adhesion and proliferation of endothelial cells could be effectively enhanced by micropattern method.
ISSN:1674-7321
1869-1900
DOI:10.1007/s11431-009-0288-9