MOCVD of PZT thin films with different precursor solutions for testing mass-production compatibility
Saved in:
Published in | Journal of the Electrochemical Society Vol. 150; no. 10; pp. C678 - C687 |
---|---|
Main Authors | , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.10.2003
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0013-4651 1945-7111 |
---|---|
DOI: | 10.1149/1.1602082 |