Miniature liquid-crystal-on-silicon display assembly

• Published in: Optics letters Vol. 23; no. 12; p. 972
• Main Authors: Kazlas, P T, Johnson, K M, McKnight, D J
• Format: Journal Article
• Language: English
• Published: United States 15.06.1998

A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The ph...