Miniature liquid-crystal-on-silicon display assembly
A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The ph...
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Published in | Optics letters Vol. 23; no. 12; p. 972 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
United States
15.06.1998
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Online Access | Get more information |
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