Miniature liquid-crystal-on-silicon display assembly

A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The ph...

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Bibliographic Details
Published inOptics letters Vol. 23; no. 12; p. 972
Main Authors Kazlas, P T, Johnson, K M, McKnight, D J
Format Journal Article
LanguageEnglish
Published United States 15.06.1998
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Summary:A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-crystal cell gap control (<2.5 microm) with excellent uniformity (+/-100 nm) for glass-on-glass and glass-on-silicon assemblies. The resin is compatible with common liquid-crystal alignment films and exhibits a bonding shear strength of 22+/-3.2 MPa The assembly process flow and characterization of demonstration devices are described.
ISSN:0146-9592
DOI:10.1364/OL.23.000972