Miniature liquid-crystal-on-silicon display assembly
A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The ph...
Saved in:
Published in | Optics letters Vol. 23; no. 12; p. 972 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
United States
15.06.1998
|
Online Access | Get more information |
Cover
Loading…
Abstract | A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-crystal cell gap control (<2.5 microm) with excellent uniformity (+/-100 nm) for glass-on-glass and glass-on-silicon assemblies. The resin is compatible with common liquid-crystal alignment films and exhibits a bonding shear strength of 22+/-3.2 MPa The assembly process flow and characterization of demonstration devices are described. |
---|---|
AbstractList | A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating speed defines the cell gap, photolithography defines the cell perimeter and spacers, and thermocompression bonding provides the adhesion. The photodefined adhesive spacers provide thin liquid-crystal cell gap control (<2.5 microm) with excellent uniformity (+/-100 nm) for glass-on-glass and glass-on-silicon assemblies. The resin is compatible with common liquid-crystal alignment films and exhibits a bonding shear strength of 22+/-3.2 MPa The assembly process flow and characterization of demonstration devices are described. |
Author | McKnight, D J Johnson, K M Kazlas, P T |
Author_xml | – sequence: 1 givenname: P T surname: Kazlas fullname: Kazlas, P T – sequence: 2 givenname: K M surname: Johnson fullname: Johnson, K M – sequence: 3 givenname: D J surname: McKnight fullname: McKnight, D J |
BackLink | https://www.ncbi.nlm.nih.gov/pubmed/18087401$$D View this record in MEDLINE/PubMed |
BookMark | eNo1jrtqxDAURFVs2Ge61ME_IOfqSrbkMix5gcM2Sb3IlgQKsuxYduG_jyFJNcwcGM6BbGIfLSF3DHLGS_FwqXPkOQBUEjdkD0yUtCoq3JFDSl_rXkrOt2THFCgpgO2JePfR62kebRb89-wNbcclTTrQPtLkg2_7mBmfhqCXTKdkuyYsJ3LjdEj29i-P5PP56eP8SuvLy9v5saYtKjVRaSpwkrlWNJYL4GsFzQ0W4BpUrS4aVzgpjEImhWXVas1lyVyJuDKu8Ujuf3-HuemsuQ6j7_S4XP_18QeiykXV |
CitedBy_id | crossref_primary_10_1002_sdtp_17128 crossref_primary_10_1063_1_2168512 crossref_primary_10_1080_02678292_2022_2074560 crossref_primary_10_1889_1_1985277 crossref_primary_10_1021_acsapm_3c00351 crossref_primary_10_1016_j_tca_2004_12_004 crossref_primary_10_1109_JDT_2010_2051318 crossref_primary_10_1177_0954405415578583 crossref_primary_10_1038_lsa_2014_94 crossref_primary_10_1163_1568561042411268 crossref_primary_10_1109_JDT_2010_2049337 crossref_primary_10_1364_AO_51_003731 crossref_primary_10_1088_1367_2630_7_1_033 |
ContentType | Journal Article |
DBID | NPM |
DOI | 10.1364/OL.23.000972 |
DatabaseName | PubMed |
DatabaseTitle | PubMed |
DatabaseTitleList | PubMed |
Database_xml | – sequence: 1 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database |
DeliveryMethod | no_fulltext_linktorsrc |
Discipline | Physics |
ExternalDocumentID | 18087401 |
Genre | Journal Article |
GroupedDBID | --- -~X .DC 123 29N 4.4 53G 6TJ AAWJZ ABTAH ACBEA ACGFO AENEX AFFNX AKGWG ALMA_UNASSIGNED_HOLDINGS ATHME AYPRP AZSQR AZYMN CS3 DSZJF DU5 EBS EJD F5P H~9 NPM ODPQJ OFLFD OPJBK OPLUZ P2P RNS ROP ROS S10 SJN TAE TI1 TN5 TR6 UCJ VOH WH7 XJT Y7S YNT ZE2 ZY4 |
ID | FETCH-LOGICAL-c288t-7d90f71fc4be3403d900a3d250fb28ca5bf5f74d82174e190973761f622a5b3a2 |
ISSN | 0146-9592 |
IngestDate | Sat Sep 28 08:38:42 EDT 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 12 |
Language | English |
LinkModel | OpenURL |
MergedId | FETCHMERGED-LOGICAL-c288t-7d90f71fc4be3403d900a3d250fb28ca5bf5f74d82174e190973761f622a5b3a2 |
PMID | 18087401 |
ParticipantIDs | pubmed_primary_18087401 |
PublicationCentury | 1900 |
PublicationDate | 1998-Jun-15 |
PublicationDateYYYYMMDD | 1998-06-15 |
PublicationDate_xml | – month: 06 year: 1998 text: 1998-Jun-15 day: 15 |
PublicationDecade | 1990 |
PublicationPlace | United States |
PublicationPlace_xml | – name: United States |
PublicationTitle | Optics letters |
PublicationTitleAlternate | Opt Lett |
PublicationYear | 1998 |
SSID | ssj0006733 |
Score | 1.7041076 |
Snippet | A novel integrated assembly process for miniature liquid-crystal-on-silicon displays using photodefinable benzocyclobutene resin is presented. Spin coating... |
SourceID | pubmed |
SourceType | Index Database |
StartPage | 972 |
Title | Miniature liquid-crystal-on-silicon display assembly |
URI | https://www.ncbi.nlm.nih.gov/pubmed/18087401 |
Volume | 23 |
hasFullText | |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8QwEA4-ELyI77f04G2JtkmaNEcRZRF39bCCN2nTBgrdbnXXg_56p0m6u64uPi6lTUpI5mumk0y-GYROWSCoEEGAlZIMM04pjmWQYZ1qGfGa6Wi2Bjpd3n5gN4_hY5Ng3LFLRsmZev-WV_IfVKEMcK1Zsn9AdtwoFMA94AtXQBiuv8K4k5e5CczZKvLn1zzF6uUNrL0CD0o8zAsAuaw9MFURv7XASM76SfHJi3tXmSDNhaH0TLw68XthaV73kyPULpOW0QutKc-_jURiNJfzMKUTTh3HlkQ53lXkWIbyk1q0NOAGfjKl5KRNtvNF-VLOQGJ3t2ekjhrrz7wGoqv6Bogg8k0iwJ9rZ0JhN1WLaFFEtTrr1lsz7rfLBaX2vKodi2M5QKfOp7tUR4l1zcysJIxF0VtHa24p4F1YXDfQQlZuohVzJFcNtxAbo-vNRddz6HoNutvo4fqqd9nGLscFViSKRlik0tci0IolGWU-hUc_pikYpjohkYrDRIdasDSql44ZWG8S5hYPNCcE6mhMdtBSOSizPeRBM2DbktTXjLIoljINEiFDojlXlFC6j3btcJ8qG8jkqRHEwdyaQ7Q6-WCO0LKGmZMdgxk2Sk6M-D8AW18row |
link.rule.ids | 786 |
linkProvider | National Library of Medicine |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Miniature+liquid-crystal-on-silicon+display+assembly&rft.jtitle=Optics+letters&rft.au=Kazlas%2C+P+T&rft.au=Johnson%2C+K+M&rft.au=McKnight%2C+D+J&rft.date=1998-06-15&rft.issn=0146-9592&rft.volume=23&rft.issue=12&rft.spage=972&rft_id=info:doi/10.1364%2FOL.23.000972&rft_id=info%3Apmid%2F18087401&rft_id=info%3Apmid%2F18087401&rft.externalDocID=18087401 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0146-9592&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0146-9592&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0146-9592&client=summon |