Computer simulation of nanoporous alumina microcantilevers and the study of the influence of porosity on the elastic moduli of oxide

The results of the finite element modeling of oscillations of porous anodic aluminum oxide (AAO) microcantilevers (MCs) are shown. The influence of porosity on the elastic moduli of AAO is studied using the investigated model. Analytical dependences of the influence of porosity on the elastic moduli...

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Bibliographic Details
Published inNanotechnologies in Russia Vol. 10; no. 5-6; pp. 428 - 433
Main Authors Simonov, V. N., Matison, N. L., Boitsova, O. V., Krasil’nikova, O. K.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.05.2015
Subjects
Chemistry and Materials Science
Industrial and Production Engineering
Machines
Manufacturing
Materials Science
Nanotechnology
Processes
Elastic Modulus
Anodic Alumina Film
Element Modal Analysis
Nanoporous Anodic Aluminum
Young Modulus
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Summary:The results of the finite element modeling of oscillations of porous anodic aluminum oxide (AAO) microcantilevers (MCs) are shown. The influence of porosity on the elastic moduli of AAO is studied using the investigated model. Analytical dependences of the influence of porosity on the elastic moduli are obtained. It is shown that this effect can be assumed to be approximately proportional to the square of the volume of the space between the pores.
ISSN:1995-0780
1995-0799
DOI:10.1134/S1995078015030167