Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy

The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in...

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Published inApplied optics (2004) Vol. 38; no. 4; p. 684
Main Authors Asadchikov, V E, Duparré, A, Jakobs, S, Karabekov, A Y, Kozhevnikov, I V, Krivonosov, Y S
Format Journal Article
LanguageEnglish
Published United States 01.02.1999
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Summary:The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.38.000684