Fabrication of BaTiO3 microstructures by hydrothermal growth

Barium titanate microstructures were fabricated on (100) silicon/platinum substrates coated with photoresist and titanium by combination of hydrothermal and lift-off techniques. The microstructures are well defined and adhere well to the substrate. The profiles of the line structure are twice as thi...

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 144; no. 11; pp. L292 - L293
Main Authors HOFFMANN, T, DOLL, T, FUENZALIDA, V. M
Format Journal Article
LanguageEnglish
Published Pennington, NJ Electrochemical Society 01.11.1997
Subjects
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Ternary compound
Hydrothermal growth
Lift off
Microelectronic fabrication
Barium Titanates
Surface analysis
X ray diffractometry
Microstructure
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Summary:Barium titanate microstructures were fabricated on (100) silicon/platinum substrates coated with photoresist and titanium by combination of hydrothermal and lift-off techniques. The microstructures are well defined and adhere well to the substrate. The profiles of the line structure are twice as thick as the starting titanium structures due to the reaction of the titanium layer with the barium ions from the aqueous solution. Analysis by XRD shows that the barium titanate grows in its cubic phase and that the titanium layer is not consumed completely by the hydrothermal reaction. 13 refs.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0013-4651
1945-7111
DOI:10.1149/1.1838072