Reference material for transmission electron microscope calibration

We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabric...

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Bibliographic Details
Published inMeasurement science & technology Vol. 22; no. 9; pp. 94014 - 1-5
Main Authors Filippov, M N, Gavrilenko, V P, Kovalchuk, M V, Mityukhlyaev, V B, Ozerin, Yu V, Rakov, A V, Roddatis, V V, Todua, P A, Vasiliev, A L
Format Journal Article
LanguageEnglish
Published 01.09.2011
Subjects
Calibration
Cross sections
Lattices
Microscopes
Reference materials
Scanning electron microscopy
Transmission electron microscopy
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Summary:We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30000 times).
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/22/9/094014