Interface and nanostructure evolution of cobalt germanides on Ge(001)

Cobalt germanide (CoxGey) is a candidate system for low resistance contact modules in future Ge devices in Si-based micro and nanoelectronics. In this paper, we present a detailed structural, morphological, and compositional study on CoxGey formation on Ge(001) at room temperature metal deposition a...

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Bibliographic Details
Published inJournal of applied physics Vol. 115; no. 7
Main Authors Grzela, T., Koczorowski, W., Capellini, G., Czajka, R., Radny, M. W., Curson, N., Schofield, S. R., Schubert, M. A., Schroeder, T.
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 21.02.2014
Subjects
ANNEALING
Applied physics
APPROXIMATIONS
Cobalt
COBALT COMPOUNDS
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
CRYSTAL STRUCTURE
Deposition
ELECTRON DIFFRACTION
EMISSION SPECTROSCOPY
Evolution
GERMANIDES
GERMANIUM
INTERFACES
LAYERS
Low energy electron diffraction
Low resistance
Microscopy
Nanoelectronics
NANOSCIENCE AND NANOTECHNOLOGY
Nanostructure
NANOSTRUCTURES
Photoelectric emission
PHOTOEMISSION
SCANNING TUNNELING MICROSCOPY
SILICON
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0273-0400 K
TRANSMISSION ELECTRON MICROSCOPY
Wetting
X ray spectra
X-RAY SPECTROSCOPY
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Summary:Cobalt germanide (CoxGey) is a candidate system for low resistance contact modules in future Ge devices in Si-based micro and nanoelectronics. In this paper, we present a detailed structural, morphological, and compositional study on CoxGey formation on Ge(001) at room temperature metal deposition and subsequent annealing. Scanning tunneling microscopy and low energy electron diffraction clearly demonstrate that room temperature deposition of approximately four monolayers of Co on Ge(001) results in the Volmer Weber growth mode, while subsequent thermal annealing leads to the formation of a Co-germanide continuous wetting layer which evolves gradually towards the growth of elongated CoxGey nanostructures. Two types of CoxGey nanostructures, namely, flattop- and ridge-type, were observed and a systematic study on their evolution as a function of temperature is presented. Additional transmission electron microscopy and x-ray photoemission spectroscopy measurements allowed us to monitor the reaction between Co and Ge in the formation process of the CoxGey continuous wetting layer as well as the CoxGey nanostructures.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4865955