A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge

Abstract The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. E...

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Bibliographic Details
Published inPlasma sources science & technology Vol. 30; no. 4; p. 45003
Main Authors Hippler, Rainer, Cada, Martin, Hubicka, Zdenek
Format Journal Article
LanguageEnglish
Published 01.04.2021
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Summary:Abstract The performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/abe0cc