A Novel Reactive Gas Source and Its Application to Carbon Nanotube Film Deposition

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Bibliographic Details
Published inChinese physics letters Vol. 22; no. 1; pp. 161 - 163
Main Authors Nan, Jiang, Han-Yuan, Chen, Sheng-Fa, Qian
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.01.2005
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/22/1/046