Effect of layer thickness on thermoelectric properties of multilayered Si1-xGex/Si after bombardment by 5 MeV Si ions

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Bibliographic Details
Published inSurface & coatings technology Vol. 201; no. 19-20; pp. 8531 - 8533
Main Authors ZHENG, B, BUDAK, S, ZIMMERMAN, R. L, MUNTELE, C, CHHAY, B, ILA, D
Format Conference Proceeding Journal Article
LanguageEnglish
Published Lausanne Elsevier 05.08.2007
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Physics
Surface treatments
Thin films
Multilayers
Ion irradiation
81.07.-b
Ion beam
Thermal conductivity
Surface treatments
Thermoelectric multilayer; Ion bombardment; Thermal conductivity measurement of thin film by 3ω
Layer thickness
Thermoelectric properties
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ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2006.12.029