Semi-quantitative study on the Staebler–Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system
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Published in | Chinese physics (Beijing, China) Vol. 15; no. 4; pp. 813 - 817 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.04.2006
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Online Access | Get full text |
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ISSN: | 1009-1963 1741-4199 |
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DOI: | 10.1088/1009-1963/15/4/024 |