A new grid-type electron filter for volume-production negative-ion source
A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respe...
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Published in | Europhysics letters Vol. 97; no. 5; pp. 55001 - 55005 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
EPS, SIF, EDP Sciences and IOP Publishing
01.03.2012
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Subjects | |
Online Access | Get full text |
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Summary: | A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respect to a relatively high-area electrode that allows to extract the negative ions. Measurements of negative-ion energy distribution functions conducted using a magnetically filtered energy analyzer show broad (250 mm) negative-ion beam formation with controllable energy starting from several eV. A conclusion is made about the possibility of practical application of the grid-type electron filter in negative ion sources for electric propulsion and etching technologies. |
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Bibliography: | publisher-ID:epl14326 istex:AC3FCE25E79E4C3E04F316E5F201006F0465EF16 ark:/67375/80W-BT694ZL0-X |
ISSN: | 0295-5075 1286-4854 |
DOI: | 10.1209/0295-5075/97/55001 |