A new grid-type electron filter for volume-production negative-ion source

• Published in: Europhysics letters Vol. 97; no. 5; pp. 55001 - 55005
• Main Authors: Rafalskyi, D. V., Dudin, S. V.
• Format: Journal Article
• Language: English
• Published: EPS, SIF, EDP Sciences and IOP Publishing 01.03.2012
• Subjects: 52.27.Cm; 52.50.Dg; 52.59.Bi
• ISSN: 0295-5075; 1286-4854
• DOI: 10.1209/0295-5075/97/55001

A new system providing continuous generation of broad negative-ion beam is described and characterized. The key element of the system is the grid-type electron filter allowing the formation without magnetic field of a stationary highly electronegative plasma which can be biased negatively with respect to a relatively high-area electrode that allows to extract the negative ions. Measurements of negative-ion energy distribution functions conducted using a magnetically filtered energy analyzer show broad (250 mm) negative-ion beam formation with controllable energy starting from several eV. A conclusion is made about the possibility of practical application of the grid-type electron filter in negative ion sources for electric propulsion and etching technologies.