Reliable four-point flexion test and model for die-to-wafer direct bonding

For many years, wafer-to-wafer (W2W) direct bonding has been very developed particularly in terms of bonding energy measurement and bonding mechanism comprehension. Nowadays, die-to-wafer (D2W) direct bonding has gained significant attention, for instance, in photonics and microelectro-mechanics, wh...

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Bibliographic Details
Published inJournal of applied physics Vol. 118; no. 1
Main Authors Tabata, T., Sanchez, L., Fournel, F., Moriceau, H.
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 07.07.2015
Subjects
Applied physics
BEAMS
BONDING
Bonding strength
Cantilever beams
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
COMPARATIVE EVALUATIONS
DIES
Edge effect
Energy measurement
FRICTION
INTERFACES
Measurement techniques
Model testing
MODIFICATIONS
Photonics
Silicon dioxide
SILICON OXIDES
STRESS CORROSION
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ISSN0021-8979
1089-7550
DOI10.1063/1.4923357

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Summary:For many years, wafer-to-wafer (W2W) direct bonding has been very developed particularly in terms of bonding energy measurement and bonding mechanism comprehension. Nowadays, die-to-wafer (D2W) direct bonding has gained significant attention, for instance, in photonics and microelectro-mechanics, which supposes controlled and reliable fabrication processes. So, whatever the stuck materials may be, it is not obvious whether bonded D2W structures have the same bonding strength as bonded W2W ones, because of possible edge effects of dies. For that reason, it has been strongly required to develop a bonding energy measurement technique which is suitable for D2W structures. In this paper, both D2W- and W2W-type standard SiO2-to-SiO2 direct bonding samples are fabricated from the same full-wafer bonding. Modifications of the four-point flexion test (4PT) technique and applications for measuring D2W direct bonding energies are reported. Thus, the comparison between the modified 4PT and the double-cantilever beam techniques is drawn, also considering possible impacts of the conditions of measures such as the water stress corrosion at the debonding interface and the friction error at the loading contact points. Finally, reliability of a modified technique and a new model established for measuring D2W direct bonding energies is demonstrated.
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ISSN:0021-8979
1089-7550
DOI:10.1063/1.4923357