6FDA-ODA waveguides etched by ion shrinkage
Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage wi...
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Published in | Synthetic metals Vol. 115; no. 1; pp. 33 - 35 |
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Main Authors | , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
01.11.2000
Amsterdam Elsevier Science New York, NY |
Subjects | |
Online Access | Get full text |
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Summary: | Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage with energetic ions (
E>50
keV). As ion bombarded polymers show losses higher than 2.3
db/cm, the choice has been made to elaborate salient guides of virgin 6FDA-ODA. The fabrication conditions are presented. We then discuss about the wave-guiding properties of the polymer structures. |
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ISSN: | 0379-6779 1879-3290 |
DOI: | 10.1016/S0379-6779(00)00295-2 |