6FDA-ODA waveguides etched by ion shrinkage

Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage wi...

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Bibliographic Details
Published inSynthetic metals Vol. 115; no. 1; pp. 33 - 35
Main Authors Trigaud, T, Aubry, C, Chiron, D, Moliton, J.P, Colombeau, B
Format Journal Article Conference Proceeding
LanguageEnglish
Published Lausanne Elsevier B.V 01.11.2000
Amsterdam Elsevier Science
New York, NY
Subjects
6FDA-ODA polyimide
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics. Optical fibers and wave guides
Ion irradiation
Microelectronic fabrication (materials and surfaces technology)
Optical and optoelectronic circuits
Optical guide
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Shrinkage
Optical guide
Ion irradiation
Shrinkage
6FDA-ODA polyimide
Polyimide
Ion beam etching
Waveguide
Production process
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Summary:Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage with energetic ions ( E>50 keV). As ion bombarded polymers show losses higher than 2.3 db/cm, the choice has been made to elaborate salient guides of virgin 6FDA-ODA. The fabrication conditions are presented. We then discuss about the wave-guiding properties of the polymer structures.
ISSN:0379-6779
1879-3290
DOI:10.1016/S0379-6779(00)00295-2