Analytical solution for depth scale calculations in Rutherford backscattering spectrometry

An analytic approximation is presented that allows a straightforward calculation of impurity concentration depth profiles from a measured Rutherford backscattering spectrum. The depth scale calculations consider energy-dependent stopping power data. Calculation of the concentration assumes Rutherfor...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 272; pp. 18 - 22
Main Authors Shakhvorostov, D., Lennard, W.N., Norton, P.R.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.02.2012
Subjects
Aluminum
Approximation
Backscattering
Beam interactions
Depth scale
Energy of solution
Mathematical analysis
Mathematical models
Projectiles
Rutherford backscattering
Depth scale
Rutherford backscattering
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Summary:An analytic approximation is presented that allows a straightforward calculation of impurity concentration depth profiles from a measured Rutherford backscattering spectrum. The depth scale calculations consider energy-dependent stopping power data. Calculation of the concentration assumes Rutherford cross sections including electron screening effects. The solution for the depth scale has been verified to be within 2% of the exact numerical solution in the energy range down to 20% of the incident energy. The experimental depth profiles obtained for Au in Al and Ir in Si using MeV 12 C projectile ions show good agreement with the present approximation.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2011.01.024