Dip-coated HNR120 photoresists thin-film optical waveguides

• Published in: Optik (Stuttgart) Vol. 116; no. 3; pp. 107 - 110
• Main Authors: Singh, Ghanshyam K., Low, Andy L.Y., Seng Yong, Yik
• Format: Journal Article
• Language: English
• Published: Jena Elsevier GmbH 01.01.2005; Elsevier
• Subjects: Applied sciences; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; HNR120; Integrated optics. Optical fibers and wave guides; Optical and optoelectronic circuits; Optical loss; Optical waveguides; Refractive index; Thin films; Waveguides, couplers, and arrays; Thin films; Optical loss; HNR120; Refractive index; Optical waveguides; Integrated optics; Temperature dependence; Thin film device; Refraction index; Polymer; Experimental study; Equipment characterization; Thin film; Optical losses; Manufacturing process; Birefringence; Optical waveguide; Light dispersion; Photoresist
• ISSN: 0030-4026; 1618-1336
• DOI: 10.1016/j.ijleo.2004.11.010

We report on our systematic and detailed study of fabrication and characterization of HNR120 photoresists thin-film optical waveguides. Various waveguide properties, such as refractive index, optical losses as a function of temperature, waveguide thickness, dispersion and birefringence have been studied. The optical loss are found to be <1.4 dB cm −1.