Reduction of insertion loss after annealing of silicon oxynitride optical waveguides

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Bibliographic Details
Published inChinese physics (Beijing, China) Vol. 11; no. 1; pp. 83 - 86
Main Authors De-Yan, He, McGreer, K. A
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.01.2002
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ISSN:1009-1963
1741-4199
DOI:10.1088/1009-1963/11/1/317